The POU3500 technique gives dynamic temperature Charge of the method chamber cathode / electrode / anode and will be synchronized with any etch method.
thirty% of its peak electric power use, offering our clients substantial reduction in running expenditures and greater dependability.
Using the POU3500, you can attain unprecedented brings about etch performance, chamber uptime, minimized cost of ownership and fab Room utilization – all when increasing your procedure reliability.
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LAUDA-Noah will, to get a shopper's retrofit analysis, keep track of and change its fluid temperature Handle profiles to match an existing TCUs' as a way to ensure a clean method integration via DAQ.
we've been guided within our perception that prosperity Within this competitive industry stems from offering clients with highly engineered new products and solutions and world class customer service.
The precision with the POU 3500 permits independent Charge of the method fluid temperature to your wafer chuck within just +/- 0.one °C of set point, as well as the rapid response time of the system allows for maximum wafer-to-wafer repeatability through the entire etch method.
Along with the POU3300, you are able to obtain unparalleled ends in etch effectiveness, chamber uptime, minimized expense of possession and fab House utilization – all whilst improving your approach trustworthiness.
huge Footprint: Static units occupy major Place throughout the fabrication Software place, lessening its performance.
LAUDA-Noah is meeting these new problems and it has integrated Electricity conserving technological innovation in systems that are friendly on the surroundings and also have a low priced to work.
the information established Here's from a 200mm volume production wafer fab and clearly illustrates the advantage of the LAUDA-Noah POU process.
greater than at any time, shrinking device geometries, demanding new processes along with a extremely competitive ecosystem demand temperature Handle programs that Blend quick and accurate temperature Management with an emphasis on diminished functioning charges and improved dependability.
Confirmed; TEs' stand for just one Section of a chiller's structure. The switching & Handle approaches utilized by a chiller will influence the TEs' trustworthiness.
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